Invention Grant
- Patent Title: Protective film detecting apparatus and protective film detecting method
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Application No.: US14924915Application Date: 2015-10-28
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Publication No.: US09613415B2Publication Date: 2017-04-04
- Inventor: Yu Kudo , Yusaku Ito , Tomoaki Endo , Yukinobu Ohura , Ayana Nakanishi , Senichi Ryo , Kentaro Odanaka
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP2014-221400 20141030
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00

Abstract:
Disclosed herein is a protective film detecting method including the steps of supplying a mist to a work surface of a workpiece in the condition where the work surface is coated with a protective film, applying light to the work surface of the workpiece, imaging the work surface of the workpiece after supplying the mist, and detecting an uncoated area where the protective film is not formed, by using a difference in light intensity between a coated area where the protective film is formed and the uncoated area where the protective film is not formed to cause the formation of asperities due to droplets formed from the mist supplied to the work surface of the workpiece and the occurrence of Mie scattering of the light applied to the asperities, the difference in light intensity being detected from an image obtained in the imaging step.
Public/Granted literature
- US20160125591A1 PROTECTIVE FILM DETECTING APPARATUS AND PROTECTIVE FILM DETECTING METHOD Public/Granted day:2016-05-05
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