Invention Grant
- Patent Title: MEMS anti-phase vibratory gyroscope
-
Application No.: US14270596Application Date: 2014-05-06
-
Publication No.: US09618342B2Publication Date: 2017-04-11
- Inventor: Lian Zhong Yu , Chen Sun
- Applicant: Chinese Academy of Sciences Institute of Geology and Geophysics
- Applicant Address: CN Beijing
- Assignee: Chinese Academy of Sciences Institute of Geology and Geophysics
- Current Assignee: Chinese Academy of Sciences Institute of Geology and Geophysics
- Current Assignee Address: CN Beijing
- Agency: Dergosits & Noah LLP
- Priority: CN201310221698 20130605
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; G01C19/5769

Abstract:
A MEMS anti-phase vibratory gyroscope includes two measurement masses with a top cap and a bottom cap each coupled with a respective measurement mass. The measurement masses are oppositely coupled with each other in the vertical direction. Each measurement mass includes an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame. The two measurement masses are coupled with each other through the outer frame. The inner frame is coupled with the outer frame by a plurality of first elastic beams. The mass is coupled with the inner frame by a plurality of second elastic beams. A comb coupling structure is provided along opposite sides of the outer frame and the inner frame. The two masses vibrate toward the opposite direction, and the comb coupling structure measures the angular velocity of rotation.
Public/Granted literature
- US20160238390A1 MEMS ANTI-PHASE VIBRATORY GYROSCOPE Public/Granted day:2016-08-18
Information query
IPC分类: