- 专利标题: Microelectronic environmental sensing module
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申请号: US13853801申请日: 2013-03-29
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公开(公告)号: US09618653B2公开(公告)日: 2017-04-11
- 发明人: Olivier Le Neel , Ravi Shankar , Suman Cherian
- 申请人: STMicroelectronics Pte Ltd.
- 申请人地址: SG Singapore
- 专利权人: STMicroelectronics Pte Ltd.
- 当前专利权人: STMicroelectronics Pte Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Seed Intellectual Property Law Group LLP
- 主分类号: G01K7/01
- IPC分类号: G01K7/01 ; G01K7/34 ; G01W1/02 ; G01P5/14 ; G01F1/44
摘要:
Sensors for air flow, temperature, pressure, and humidity are integrated onto a single semiconductor die within a miniaturized Venturi chamber to provide a microelectronic semiconductor-based environmental multi-sensor module that includes an air flow meter. One or more such multi-sensor modules can be used as building blocks in dedicated application-specific integrated circuits (ASICs) for use in environmental control appliances that rely on measurements of air flow. Furthermore, the sensor module can be built on top of existing circuitry that can be used to process signals from the sensors. By integrating the Venturi chamber with accompanying environmental sensors, correction factors can be obtained and applied to compensate for temporal humidity fluctuations and spatial temperature variation using the Venturi apparatus.
公开/授权文献
- US20140294046A1 MICROELECTRONIC ENVIRONMENTAL SENSING MODULE 公开/授权日:2014-10-02
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