Invention Grant
- Patent Title: CNT thin film transistor with high K polymeric dielectric
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Application No.: US14609806Application Date: 2015-01-30
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Publication No.: US09620728B2Publication Date: 2017-04-11
- Inventor: Naiying Du , Patrick Malenfant , Zhao Li , Jacques Lefebvre , Girjesh Dubey , Gregory Lopinski , Shan Zou
- Applicant: National Research Council of Canada
- Applicant Address: CA Ottawa, Ontario
- Assignee: National Research Council of Canada
- Current Assignee: National Research Council of Canada
- Current Assignee Address: CA Ottawa, Ontario
- Agent Catherine Lemay
- Priority: EP14153150 20140130
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L51/05 ; H01L51/00

Abstract:
A thin film transistor (TFT) has a gate electrode; a gate insulation layer, a semiconducting channel separated from the gate electrode by the gate insulation layer; a source electrode and a drain electrode. The gate insulation layer is a cross-linked cyanoethylated polyhydroxy polymer, e.g. a cross-linked cyanoethylated pullulan, having a high dielectric constant and the semiconducting channel has a network of semiconducting carbon nanotubes. The semiconducting channel is adhered to the gate insulation layer through a polymeric material. The carbon nanotubes adhere to the polymeric material and the polymeric material reacts or interacts with the gate insulation layer. TFTs have high mobilities while maintaining good on/off ratios.
Public/Granted literature
- US20150214496A1 CNT Thin Film Transistor With High K Polymeric Dielectric Public/Granted day:2015-07-30
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