Invention Grant
- Patent Title: Method of manufacturing display apparatus and display apparatus manufactured through the method
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Application No.: US14925644Application Date: 2015-10-28
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Publication No.: US09627417B2Publication Date: 2017-04-18
- Inventor: Jaehyun Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2015-0043303 20150327
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/66 ; H01L27/32 ; H01L29/786

Abstract:
A method of manufacturing a display apparatus includes: preparing a substrate including a pixel circuit region and a driving circuit region; forming a first active layer at the pixel circuit region; forming a second active layer at the driving circuit region; forming gate electrodes that overlap the first active layer and the second active layer, respectively, with a gate insulating layer disposed therebetween; forming a first insulating layer covering the first and second active layers; forming a first contact hole that passes through the first insulating layer until a portion of the first active layer is exposed; heat-treating the substrate where the first insulating layer, in which the first contact hole is formed, is formed; and forming a second contact hole that passes through the first insulating layer disposed on the heat-treated substrate until a portion of the second active layer is exposed.
Public/Granted literature
- US20160284733A1 METHOD OF MANUFACTURING DISPLAY APPARATUS AND DISPLAY APPARATUS MANUFACTURED THROUGH THE METHOD Public/Granted day:2016-09-29
Information query
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