- 专利标题: Imprint apparatus and article manufacturing method
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申请号: US14171909申请日: 2014-02-04
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公开(公告)号: US09636851B2公开(公告)日: 2017-05-02
- 发明人: Masayuki Tanabe , Yasuyuki Tamura , Yukio Hanyu
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2011-023516 20110207
- 主分类号: B29C59/00
- IPC分类号: B29C59/00 ; B29C43/56 ; B82Y10/00 ; B82Y40/00 ; G03F7/00 ; B29C33/00 ; B29C43/02 ; B29C59/16 ; B29C59/02 ; B29K101/00 ; B29L31/34
摘要:
An imprint apparatus of the present invention that molds and cures an imprint material on a substrate using a mold to form a pattern on the substrate. The imprint apparatus includes a supply unit configured to supply a gas into a gap between the imprint material on the substrate and the mold. The supply unit is configured to supply a mixed gas in which a permeable gas, which permeates at least one of the mold, the imprint material and the substrate, and a condensable gas, which is liquefied under a pressure generated by the molding, is mixed with each other.
公开/授权文献
- US20140145370A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD 公开/授权日:2014-05-29
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