Invention Grant
- Patent Title: Method of sheared guiding patterns
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Application No.: US14199889Application Date: 2014-03-06
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Publication No.: US09638995B2Publication Date: 2017-05-02
- Inventor: René van de Veerdonk , XiaoMin Yang , Kim Lee , Justin Hwu
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B82Y10/00 ; G11B5/74 ; G11B5/855
Abstract:
The embodiments disclose a method including depositing a resist layer using a mixture of several different length polymer strings materials spanning a range of natural periodicity, and imprinting the mixture of several different length polymer strings using sheared guiding patterns to increase flexibility.
Public/Granted literature
- US20140265025A1 METHOD OF SHEARED GUIDING PATTERNS Public/Granted day:2014-09-18
Information query
