Invention Grant
- Patent Title: Thin-film transistor (TFT), manufacturing method thereof, array substrate and display device
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Application No.: US14762076Application Date: 2014-11-21
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Publication No.: US09640553B2Publication Date: 2017-05-02
- Inventor: Chunsheng Jiang
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Banner & Witcoff, Ltd.
- Priority: CN201410381849 20140805
- International Application: PCT/CN2014/091883 WO 20141121
- International Announcement: WO2016/019652 WO 20160211
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/36 ; H01L27/12 ; H01L29/786

Abstract:
A thin-film transistor (TFT), a manufacturing method thereof, an array substrate and a display device are disclosed. The method for manufacturing the a TFT comprises the step of forming a gate electrode, a gate insulating layer, an active area, a source electrode and a drain electrode on a base substrate. The active area (4) is made of a ZnON material. When the gate insulating layer is formed, a material for forming the gate insulating layer is subjected to control treatment, so that a sub-threshold amplitude of the TFT is less than or equal to 0.5 mV/dec. The manufacturing method reduces the sub-threshold amplitude of the TFT and improves the semiconductor characteristic of the TFT.
Public/Granted literature
- US20160260744A1 Thin-Film Transistor (TFT), Manufacturing Method Thereof, Array Substrate and Display Device Public/Granted day:2016-09-08
Information query
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