Invention Grant
- Patent Title: Doping method for array substrate and manufacturing equipment of the same
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Application No.: US14426224Application Date: 2014-12-29
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Publication No.: US09640569B2Publication Date: 2017-05-02
- Inventor: Jingfeng Xue , Xin Zhang , Gui Chen
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Priority: CN201410768331 20141212
- International Application: PCT/CN2014/095383 WO 20141229
- International Announcement: WO2016/090689 WO 20160616
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L21/223 ; H01L21/265 ; H01L21/266 ; H01L29/66

Abstract:
A doping method for an array substrate and a manufacturing equipment. The doping method comprises: using a halftone mask to form a photoresist pattern layer on a gate insulation layer of a substrate; wherein, a polysilicon pattern layer is disposed on the substrate; the gate insulation layer covers the polysilicon pattern layer; the photoresist pattern layer corresponding to a heavily doping region forms a hollow portion; the photoresist pattern layer corresponding to a lightly doping region forms a first photoresist portion; the photoresist pattern layer corresponding to an undoped region forms a second photoresist portion; the first photoresist portion is thinner than the second photoresist portion; and performing one doping process to the polysilicon pattern layer such that the heavily doping region and the lightly doping region of the polysilicon pattern layer are formed simultaneously in order to reduce the manufacturing process of an LTPS array substrate.
Public/Granted literature
- US20160343745A1 DOPING METHOD FOR ARRAY SUBSTRATE AND MANUFACTURING EQUIPMENT OF THE SAME Public/Granted day:2016-11-24
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