Invention Grant
- Patent Title: MEMS driver
-
Application No.: US14586307Application Date: 2014-12-30
-
Publication No.: US09641103B2Publication Date: 2017-05-02
- Inventor: Roman Gutierrez , Hongyu Wang
- Applicant: MEMS DRIVE, INC.
- Applicant Address: US CA Arcadia
- Assignee: MEMS Drive, Inc.
- Current Assignee: MEMS Drive, Inc.
- Current Assignee Address: US CA Arcadia
- Agency: Holland & Knight 1LP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H02N1/00 ; B81B7/00

Abstract:
Systems and methods provide actuator control. Actuator control is provided via charge control as opposed to voltage control. A driver for driving an actuator can include a charge pump for injecting charge into one or more capacitive elements of the actuator. The driver can further include a capacitance detection aspect for detecting the capacitance of the capacitive elements of the actuator to determine positioning of the actuator.
Public/Granted literature
- US20160190958A1 MEMS DRIVER Public/Granted day:2016-06-30
Information query
IPC分类: