Invention Grant
- Patent Title: Apparatus for coating substrates using the EB/PVD method
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Application No.: US13642086Application Date: 2011-04-20
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Publication No.: US09644259B2Publication Date: 2017-05-09
- Inventor: Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
- Applicant: Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
- Applicant Address: DE Hanau
- Assignee: ALD Vacuum Technologies GmbH
- Current Assignee: ALD Vacuum Technologies GmbH
- Current Assignee Address: DE Hanau
- Agency: Crowell & Moring LLP
- Priority: DE102010017895 20100421
- International Application: PCT/DE2011/000434 WO 20110420
- International Announcement: WO2011/131171 WO 20111027
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/24 ; C23C14/30 ; H01J37/20 ; H01J37/305

Abstract:
An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.
Public/Granted literature
- US20130032092A1 APPARATUS FOR COATING SUBSTRATES USING THE EB/PVD METHOD Public/Granted day:2013-02-07
Information query
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