Invention Grant
- Patent Title: Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same
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Application No.: US14584190Application Date: 2014-12-29
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Publication No.: US09644272B2Publication Date: 2017-05-09
- Inventor: Suhwan Lee , Eunho Kim , Muhyun Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Display Co., ltd.
- Current Assignee: Samsung Display Co., ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2014-0084622 20140707
- Main IPC: H01L51/56
- IPC: H01L51/56 ; C23C16/54 ; C23C14/04 ; C23C14/56 ; H01L51/00
Abstract:
Disclosed is a thin film deposition apparatus and a method of manufacturing an organic light-emitting display apparatus by using the thin film deposition apparatus. The thin film deposition apparatus and the method of manufacturing the organic light-emitting display apparatus using the thin film deposition apparatus reduce manufacturing time and cost.
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