- Patent Title: Measuring apparatus where a distance between a surface of a transparent substrate on which a marker pattern is formed and a front surface is within a depth of focus of a detecting means
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Application No.: US14668584Application Date: 2015-03-25
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Publication No.: US09645087B2Publication Date: 2017-05-09
- Inventor: Masayuki Naya , Shogo Yamazoe
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2012-217669 20120928
- Main IPC: G01N21/65
- IPC: G01N21/65 ; G01N21/01 ; G01N21/64

Abstract:
An optical electric field enhancing device is used with a measuring method which includes two-dimensionally scanning a surface in in-plane direction of the surface to detect, from the rear surface side of the device, signal light emitted from each scanning point when excitation light is applied, and obtaining a two-dimensional signal image on the surface based on the detected signal light. The device includes a transparent substrate, a marker pattern directly formed on the transparent substrate and extending in a direction non-parallel to the main scanning direction of the two-dimensional scanning, and fine uneven structures formed on the marker pattern and the transparent substrate where at least the surface is made of a metal film.
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