- 专利标题: Measuring apparatus where a distance between a surface of a transparent substrate on which a marker pattern is formed and a front surface is within a depth of focus of a detecting means
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申请号: US14668584申请日: 2015-03-25
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公开(公告)号: US09645087B2公开(公告)日: 2017-05-09
- 发明人: Masayuki Naya , Shogo Yamazoe
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2012-217669 20120928
- 主分类号: G01N21/65
- IPC分类号: G01N21/65 ; G01N21/01 ; G01N21/64
摘要:
An optical electric field enhancing device is used with a measuring method which includes two-dimensionally scanning a surface in in-plane direction of the surface to detect, from the rear surface side of the device, signal light emitted from each scanning point when excitation light is applied, and obtaining a two-dimensional signal image on the surface based on the detected signal light. The device includes a transparent substrate, a marker pattern directly formed on the transparent substrate and extending in a direction non-parallel to the main scanning direction of the two-dimensional scanning, and fine uneven structures formed on the marker pattern and the transparent substrate where at least the surface is made of a metal film.
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