Invention Grant
- Patent Title: Scanning probe microscope
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Application No.: US14671775Application Date: 2015-03-27
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Publication No.: US09645170B2Publication Date: 2017-05-09
- Inventor: Masatsugu Shigeno
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Brinks Gilson & Lione
- Priority: JP2014-066363 20140327
- Main IPC: G01Q70/12
- IPC: G01Q70/12 ; G01Q70/02 ; G01Q70/10

Abstract:
A scanning probe microscope includes a cantilever that has a first attachment surface and a cantilever attachment portion that has a second attachment surface to which the first attachment surface of the cantilever is attached. Columnar elements including nanofibers or nanotubes are formed on the second attachment surface, and the second attachment surface adheres to the first attachment surface by using the columnar element.
Public/Granted literature
- US20150276797A1 SCANNING PROBE MICROSCOPE Public/Granted day:2015-10-01
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