Invention Grant
- Patent Title: Thin-film transistor and method for manufacturing the same
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Application No.: US15051786Application Date: 2016-02-24
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Publication No.: US09647134B2Publication Date: 2017-05-09
- Inventor: Masato Hiramatsu , Masayoshi Fuchi , Arichika Ishida
- Applicant: Japan Display Inc.
- Applicant Address: JP Minato-ku
- Assignee: JAPAN DISPLAY INC.
- Current Assignee: JAPAN DISPLAY INC.
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-107376 20130521
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/49 ; H01L29/66 ; H01L21/02 ; H01L21/465 ; H01L21/443 ; H01L29/24

Abstract:
According to one embodiment, a thin-film transistor comprises an oxide semiconductor layer formed on a part of a substrate, a first gate insulator film of a silicon dioxide film formed on the oxide semiconductor layer and by the CVD method with a silane-based source gas, a second gate insulator film of a silicon dioxide film formed on the first gate insulator film by the CVD method with a TEOS source gas, and a gate electrode formed on the second gate insulator film.
Public/Granted literature
- US20160172503A1 THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-06-16
Information query
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