Invention Grant
- Patent Title: Integrated phase change switch
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Application No.: US15164540Application Date: 2016-05-25
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Publication No.: US09647209B2Publication Date: 2017-05-09
- Inventor: Sinan Goktepeli , Michael A. Stuber
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
Various methods and devices that involve phase change material (PCM) switches are disclosed. An exemplary integrated circuit comprises an active layer with a plurality of field effect transistor (FET) channels for a plurality of FETs. The integrated circuit also comprises an interconnect layer comprising a plurality of conductive interconnects. The plurality of conductive interconnects couple the plurality of field effect transistors. The integrated circuit also comprises an insulator layer covering at least a portion of the interconnect layer. The integrated circuit also comprises a channel of a radio-frequency (RF) PCM switch. The channel of the RF PCM switch is formed on the insulator layer.
Public/Granted literature
- US20160268504A1 INTEGRATED PHASE CHANGE SWITCH Public/Granted day:2016-09-15
Information query
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