Invention Grant
- Patent Title: Integrated shielding for wafer plating
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Application No.: US13028380Application Date: 2011-02-16
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Publication No.: US09653339B2Publication Date: 2017-05-16
- Inventor: Tim Olson
- Applicant: Tim Olson
- Applicant Address: US AZ Tempe
- Assignee: Deca Technologies Inc.
- Current Assignee: Deca Technologies Inc.
- Current Assignee Address: US AZ Tempe
- Agency: Booth Udall Fuller, PLC
- Main IPC: C25D17/06
- IPC: C25D17/06 ; C25D7/12 ; C25D17/00 ; H01L21/687

Abstract:
A semiconductor substrate carrier for use during wet chemical processing may comprise a conductive flange to couple the carrier with processing equipment, a frame coupled with the conductive flange, where the frame is configured to hold a semiconductor substrate, and an integrated shield coupled with the frame. The integrated shield is configured to alter an electric field near at least a portion of a surface of the semiconductor substrate during the wet chemical processing.
Public/Granted literature
- US20110308955A1 INTEGRATED SHIELDING FOR WAFER PLATING Public/Granted day:2011-12-22
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