- 专利标题: Nonvolatile memory device and method for manufacturing the same
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申请号: US15012039申请日: 2016-02-01
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公开(公告)号: US09653562B2公开(公告)日: 2017-05-16
- 发明人: Jin-Ho Kim , Sung-Lae Oh , Chang-Man Son , Go-Hyun Lee
- 申请人: SK hynix Inc.
- 申请人地址: KR Gyeonggi-do
- 专利权人: SK Hynix Inc.
- 当前专利权人: SK Hynix Inc.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: IP & T Group LLP
- 优先权: KR10-2015-0125734 20150904
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/423 ; H01L27/11556 ; H01L27/11582 ; H01L29/40
摘要:
A nonvolatile memory device includes a pipe gate electrode layer formed over a substrate; a plurality of conductive layers stacked over the pipe gate electrode layer; source lines formed over an uppermost one of the conductive layers; first slits passing through the pipe gate electrode layer at positions overlapping with the source lines, and dividing the pipe gate electrode layer into a plurality of pipe gate electrodes, and second slits passing through the conductive layers at positions different from the first slits, and dividing the conductive layers into a plurality of memory blocks.
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