Invention Grant
- Patent Title: GaN substrate, semiconductor device and method for fabricating GaN substrate and semiconductor device
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Application No.: US14466295Application Date: 2014-08-22
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Publication No.: US09653588B2Publication Date: 2017-05-16
- Inventor: Zhenghai Zhang , Zongmin Zhang , Bocheng Cao
- Applicant: Huawei Technologies Co., Ltd.
- Applicant Address: CN Shenzhen
- Assignee: Huawei Technologies Co., Ltd.
- Current Assignee: Huawei Technologies Co., Ltd.
- Current Assignee Address: CN Shenzhen
- Agency: Conley Rose, P.C.
- Priority: CN201210086294 20120328
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/66 ; H01L29/20 ; H01L21/02 ; H01L29/06 ; H01L29/205

Abstract:
A gallium nitride (GaN) substrate, a semiconductor device, and methods for fabricating a GaN substrate and a semiconductor device are provided. The GaN substrate includes: a GaN base; an aluminum gallium nitride (AlGaN) layer, disposed on the GaN base; and a p-type conducting layer disposed on an active area of the AlGaN layer, and used to exhaust surface state negative electrons on the AlGaN layer and neutralize a dangling bond on the AlGaN layer. The p-type conducting layer is formed on the AlGaN layer, and a hole charge carrier in the p-type conducting layer can be used to exhaust the surface state negative electrons on an n-type AlGaN layer, neutralize the dangling bond on a section of the AlGaN layer, and prevent the forming of a virtual gate, so as to suppress a current collapse effect of the semiconductor device fabricated using the GaN substrate.
Public/Granted literature
- US20140361311A1 GaN Substrate, Semiconductor Device and Method for Fabricating GaN Substrate and Semiconductor Device Public/Granted day:2014-12-11
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