- 专利标题: Semiconductor device and method of manufacturing semiconductor device
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申请号: US15252623申请日: 2016-08-31
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公开(公告)号: US09653599B2公开(公告)日: 2017-05-16
- 发明人: Yusuke Kobayashi , Manabu Takei , Shinsuke Harada
- 申请人: FUJI ELECTRIC CO., LTD. , NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- 申请人地址: JP Kawasaki-Shi, Kanagawa JP Tokyo
- 专利权人: FUJI ELECTRIC CO., LTD.,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- 当前专利权人: FUJI ELECTRIC CO., LTD.,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- 当前专利权人地址: JP Kawasaki-Shi, Kanagawa JP Tokyo
- 代理机构: Rabin & Berdo, P.C.
- 优先权: JP2015-206285 20151020
- 主分类号: H01L29/15
- IPC分类号: H01L29/15 ; H01L31/0312 ; H01L29/78 ; H01L29/16 ; H01L29/66 ; H01L29/06
摘要:
In a front surface of a semiconductor base body, a gate trench is disposed penetrating an n+-type source region and a p-type base region to a second n-type drift region. In the second n-type drift region, a p-type semiconductor region is selectively disposed. Between adjacent gate trenches, a contact trench is disposed penetrating the n+-type source region and the p-type base region, and going through the second n-type drift region to the p-type semiconductor region. A source electrode embedded in the contact trench contacts the p-type semiconductor region at a bottom portion and corner portion of the contact trench, and forms a Schottky junction with the second n-type drift region at a side wall of the contact trench.
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