Invention Grant
- Patent Title: MEMS microphone with dual-back plate and method of manufacturing the same
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Application No.: US14394473Application Date: 2012-11-29
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Publication No.: US09656854B2Publication Date: 2017-05-23
- Inventor: Shin Hur , Young Do Jung , Young Hwa Lee , Jun Hyuk Kwak , Chang-Hyeon Ji
- Applicant: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Applicant Address: KR Daejeon
- Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee Address: KR Daejeon
- Agency: Lex IP Meister, PLLC
- Priority: KR10-2012-0048922 20120509
- International Application: PCT/KR2012/010259 WO 20121129
- International Announcement: WO2013/168868 WO 20131114
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H04R19/04 ; H04R19/00 ; B81C1/00 ; C25D3/04 ; C25D3/12 ; C25D3/38 ; C25D3/44 ; C25D3/46 ; C25D3/54 ; C25D3/56 ; C25D5/02 ; C25D5/34 ; C25D7/12 ; C25D1/08

Abstract:
Disclosed herein are a microelectromechanical systems (MEMS) microphone with a dual-back plate, and a method of manufacturing the same. The MEMS microphone according to an exemplary embodiment of the present invention includes: a substrate having a first back plate formed at a central portion thereof; a membrane plate disposed on first support parts formed at both sides on the substrate and vibrated depending on external sound pressure; and a second back plate disposed on second support parts formed at both sides of the membrane plate.
Public/Granted literature
- US20150129992A1 MEMS MICROPHONE HAVING DUAL BACK PLATE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2015-05-14
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