- 专利标题： Mask assembly for thin film vapor deposition and manufacturing method thereof
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申请号： US14096816申请日： 2013-12-04
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公开(公告)号： US09657392B2公开(公告)日： 2017-05-23
- 发明人: Jeong-Won Han
- 申请人： Samsung Display Co. Ltd.
- 申请人地址： KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- 代理商 Robert E. Bushnell, Esq.
- 优先权： KR10-2012-0142767 20121210
- 主分类号： C23C16/04
- IPC分类号： C23C16/04 ; B05C21/00 ; C23C14/04
摘要：
A mask assembly includes a frame for forming an opening, and a mask fixed to the frame while a tensile force is applied thereto and forming a plurality of pattern openings. The frame includes a frame main body for forming an opening, and a plurality of moving members installed to be movable in at least one direction on the frame main body. The mask is fixed to the moving members while a tensile force is applied thereto.