Defect inspection method
Abstract:
A defect inspection method according to an embodiment has: exposing a target object to a tracer having higher absorptance for a neutron ray than the target object; radiating the neutron ray to the target object exposed to the tracer; generating at least one neutron image based on the neutron ray having penetrated the target object exposed to the tracer; and detecting a defect of the target object based on the generated at least one neutron image.
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