Invention Grant
- Patent Title: System and method for selective coil excitation in inductively coupled plasma processing reactors
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Application No.: US14341492Application Date: 2014-07-25
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Publication No.: US09659751B2Publication Date: 2017-05-23
- Inventor: Kartik Ramaswamy , Yang Yang , Steven Lane , Lawrence Wong , Joseph F. Aubuchon , Travis Koh
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H01J37/32

Abstract:
Spatial distribution of RF power delivered to plasma in a processing chamber is controlled using an arrangement of primary and secondary inductors, wherein the current through the secondary inductors affects the spatial distribution of the plasma. The secondary inductors are configured to resonate at respectively different frequencies. A first secondary inductor is selectively excited to resonance, during a first time period within a duty cycle, by delivering power to a primary inductor at the resonant frequency of the first secondary inductor. A second secondary inductor is selectively excited to resonance, during a second time period within a duty cycle, by delivering power to a primary inductor at the resonant frequency of the second secondary inductor. The secondary inductors are isolated from one another and terminated such that substantially all current that passes through them and into the plasma results from mutual inductance with a primary inductor.
Public/Granted literature
- US20160027616A1 SYSTEM AND METHOD FOR SELECTIVE COIL EXCITATION IN INDUCTIVELY COUPLED PLASMA PROCESSING REACTORS Public/Granted day:2016-01-28
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