- 专利标题: Thermally curable resin sheet for sealing semiconductor chip, and method for manufacturing semiconductor package
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申请号: US15023501申请日: 2014-09-09
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公开(公告)号: US09659883B2公开(公告)日: 2017-05-23
- 发明人: Kosuke Morita , Tsuyoshi Ishizaka , Eiji Toyoda , Goji Shiga , Chie Iino , Jun Ishii
- 申请人: NITTO DENKO CORPORATION
- 申请人地址: JP Osaka
- 专利权人: NITTO DENKO CORPORATION
- 当前专利权人: NITTO DENKO CORPORATION
- 当前专利权人地址: JP Osaka
- 代理机构: Knobbe Martens Olson & Bear, LLP
- 优先权: JP2013-196854 20130924; JP2014-167223 20140820
- 国际申请: PCT/JP2014/073755 WO 20140909
- 国际公布: WO2015/045846 WO 20150402
- 主分类号: H01L21/78
- IPC分类号: H01L21/78 ; H01L23/00 ; H01L25/00 ; H01L25/065 ; H01L23/29 ; H01L23/14 ; H01L23/498 ; H01L21/48 ; H01L21/56 ; H01L23/544
摘要:
The present invention provides a thermally curable resin sheet for sealing a semiconductor chip having excellent reliability and storability while being reduced in warpage deformation due to the volume shrinkage of the thermally curable resin sheet, and a method for manufacturing a semiconductor package. The present invention relates to a thermally curable resin sheet for sealing a semiconductor chip, wherein an activation energy (Ea) satisfies the following formula (1), a glass transition temperature of a product thermally cured at 150° C. for 1 hour is 125° C. or higher, and a thermal expansion coefficient α [ppm/K] of the thermally cured product at the glass transition temperature or lower and a storage modulus E′ [GPa] at 25° C. of the thermally cured product satisfy the following formula (2): 30≦Ea≦120 [kJ/mol] (1); and 10,000≦α×E′≦300,000 [Pa/K] (2).
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