- 专利标题: Replacement materials processes for forming cross point memory
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申请号: US15058810申请日: 2016-03-02
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公开(公告)号: US09659997B2公开(公告)日: 2017-05-23
- 发明人: Jong-Won Lee , Gianpaolo Spadini , Stephen W. Russell , Derchang Kau
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人地址: US ID Boise
- 代理机构: Holland & Hart LLP
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00 ; G11C13/00
摘要:
Methods of forming memory cells comprising phase change and/or chalcogenide materials are disclosed. In one aspect, the method includes providing a lower line stack extending in a first direction, the lower line stack comprising a sacrificial line over a lower conductive line. The method further includes forming a chalcogenide line extending in the first direction by selectively removing the sacrificial material of the sacrificial line and replacing the sacrificial line with a chalcogenide material.
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