Invention Grant
- Patent Title: Thin film transistor and method of manufacturing the same
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Application No.: US14315712Application Date: 2014-06-26
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Publication No.: US09660094B2Publication Date: 2017-05-23
- Inventor: Eun-Hyun Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2014-0001382 20140106
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/786 ; H01L29/66

Abstract:
A thin film transistor includes a gate electrode on a substrate, a gate insulating layer on the gate electrode, a semiconductor layer on the gate insulating layer, the semiconductor layer overlapping at least a portion of the gate electrode, a plurality of etch stoppers on the semiconductor layer, and a source electrode and a drain electrode spaced apart from each other and disposed on the etch stoppers and the semiconductor layer, wherein a plurality of channel regions are defined in the semiconductor layer by the etch stoppers on the semiconductor layer.
Public/Granted literature
- US20150194530A1 THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-07-09
Information query
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