- Patent Title: Low noise, high stability, deep ultra-violet, continuous wave laser
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Application No.: US15017839Application Date: 2016-02-08
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Publication No.: US09660409B2Publication Date: 2017-05-23
- Inventor: Yung-Ho Chuang
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: H01S3/00
- IPC: H01S3/00 ; G02F1/37 ; G01N21/95 ; G02F1/35 ; G01N21/33 ; G01N21/956

Abstract:
A laser for generating deep ultra-violet (DUV) continuous wave (CW) light includes a second-harmonic generator and a fourth-harmonic generator. The fourth-harmonic generator includes a plurality of mirrors as well as a first non-linear optical (NLO) crystal and a pair of tilted plates. The first NLO crystal generates the light having the fourth harmonic wavelength and a first astigmatism, and is placed in operative relation to the plurality of mirrors. The pair of tilted plates is placed in operative relation to the first NLO crystal such that the light having the second harmonic wavelength passes through both of the tilted plates. Notably, the pair of tilted plates are disposed at substantially equal and opposite angles about respective parallel axes such that they introduce a second astigmatism that corrects for the first astigmatism while minimizing displacement of the circulated light.
Public/Granted literature
- US20160197449A1 Low Noise, High Stability, Deep Ultra-Violet, Continuous Wave Laser Public/Granted day:2016-07-07
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