Invention Grant
- Patent Title: Reduced height M1 metal lines for local on-chip routing
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Application No.: US15141198Application Date: 2016-04-28
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Publication No.: US09666481B2Publication Date: 2017-05-30
- Inventor: Stanley Seungchul Song , Choh Fei Yeap , Zhongze Wang , Niladri Mojumder , Mustafa Badaroglu
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agent Alan Gordon; Kenneth Vu
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/528 ; H01L23/532 ; H01L21/02

Abstract:
Systems and methods are directed to an integrated circuit comprising a reduced height M1 metal line formed of an exemplary material with lower mean free path than Copper, for local routing of on-chip circuit elements of the integrated circuit, wherein the height of the reduced height M1 metal line is lower than a minimum allowed or allowable height of a conventional M1 metal line formed of Copper. The exemplary materials for forming the reduced height M1 metal line include Tungsten (W), Molybdenum (Mo), and Ruthenium (Ru), wherein these exemplary materials also exhibit lower capacitance and lower RC delays than Copper, while providing high electromigration reliability.
Public/Granted literature
- US20160240437A1 REDUCED HEIGHT M1 METAL LINES FOR LOCAL ON-CHIP ROUTING Public/Granted day:2016-08-18
Information query
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