Invention Grant
- Patent Title: Fuel stream generator, source collector apparatus and lithographic apparatus
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Application No.: US14380217Application Date: 2013-01-22
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Publication No.: US09671698B2Publication Date: 2017-06-06
- Inventor: Hendrikus Gijsbertus Schimmel , Dzmitry Labetski
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- International Application: PCT/EP2013/051093 WO 20130122
- International Announcement: WO2013/124101 WO 20130829
- Main IPC: G03F7/20
- IPC: G03F7/20 ; B05B1/02 ; H05G2/00
Abstract:
A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a method of generating fuel droplets and a lithography apparatus incorporating the fuel stream generator.
Public/Granted literature
- US20150029478A1 Fuel Stream Generator, Source Collector Apparatus and Lithographic Apparatus Public/Granted day:2015-01-29
Information query
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