- Patent Title: System for discharging an area that is scanned by an electron beam
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Application No.: US14710297Application Date: 2015-05-12
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Publication No.: US09673023B2Publication Date: 2017-06-06
- Inventor: Alex Goldenshtein
- Applicant: APPLIED MATERIALS ISRAEL LTD.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/22

Abstract:
A method and a system for imaging an object, the system may include electron optics that may be configured to scan a first area of the object with at least one electron beam; wherein the electron optics may include a first electrode; and light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object.
Public/Granted literature
- US20160336146A1 SYSTEM FOR DISCHARGING AN AREA THAT IS SCANNED BY AN ELECTRON BEAM Public/Granted day:2016-11-17
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