Invention Grant
- Patent Title: Interconnect structures incorporating air-gap spacers
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Application No.: US14846801Application Date: 2015-09-06
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Publication No.: US09673087B2Publication Date: 2017-06-06
- Inventor: Satya V. Nitta , Shom Ponoth
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L21/768 ; H01L23/48 ; H01L23/522 ; H01L23/532 ; H01L21/311

Abstract:
A dual damascene article of manufacture comprises a trench containing a conductive metal column where the trench and the conductive metal column extend down into and are contiguous with a via. The trench and the conductive metal column and the via have a common axis. These articles comprise interconnect structures incorporating air-gap spacers containing metal/insulator structures for Very Large Scale Integrated (VLSI) and Ultra Large Scale Integrated (ULSI) devices and packaging. The trench in this regard comprises a sidewall air-gap immediately adjacent the side walls of the trench and the conductive metal column, the sidewall air-gap extending down to the via to a depth below a line fixed by the bottom of the trench, and continues downward in the via for a distance of from about 1 Angstrom below the line to the full depth of the via. In another aspect, the article of manufacture comprises a capped dual damascene structure.
Public/Granted literature
- US20160197002A1 INTERCONNECT STRUCTURES INCORPORATING AIR-GAP SPACERS Public/Granted day:2016-07-07
Information query
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