- 专利标题: System and method for bonding package lid
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申请号: US14163000申请日: 2014-01-24
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公开(公告)号: US09673119B2公开(公告)日: 2017-06-06
- 发明人: Shih-Yen Lin , Yu-Chih Liu , Chin-Liang Chen , Wei-Ting Lin , Kuan-Lin Ho
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L23/34
- IPC分类号: H01L23/34 ; H01L23/10 ; H01L23/04 ; H01L23/31 ; H01L21/56 ; H01L23/58 ; H01L23/367 ; H01L23/00 ; H01L25/065 ; H01L25/18 ; H01L23/498
摘要:
Disclosed herein is a device having a shaped seal ring comprising a workpiece, the workpiece comprising at least one dielectric layer disposed on a first side of a substrate, a seal ring disposed in the at least one dielectric layer, and at least one groove in the seal ring. A lid is disposed over the workpiece, the workpiece extending into a recess in the lid and a first thermal interface material (TIM) contacts the seal ring and the lid, with the first TIM extending into the at least one groove. The workpiece is mounted to the package carrier. A die is mounted over a first side of workpiece and disposed in the recess. A first underfill a disposed under the die and a second underfill is disposed between the workpiece and the package carrier. The first TIM is disposed between the first underfill and the second underfill.
公开/授权文献
- US20150214128A1 System and Method for Bonding Package Lid 公开/授权日:2015-07-30
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