Invention Grant
- Patent Title: Fin isolation structures facilitating different fin isolation schemes
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Application No.: US15156506Application Date: 2016-05-17
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Publication No.: US09673222B2Publication Date: 2017-06-06
- Inventor: Ajey Poovannummoottil Jacob , Kangguo Cheng , Bruce Doris , Nicolas Loubet , Prasanna Khare , Rama Divakaruni
- Applicant: GLOBALFOUNDRIES Inc. , STMicroelectronics, Inc. , International Business Machines Corporation
- Applicant Address: KY Grand Cayman US TX Coppel;l US NY Armonk
- Assignee: GLOBALFOUNDRIES Inc.,STMicroelectronics, Inc.,International Business Machines Corporation
- Current Assignee: GLOBALFOUNDRIES Inc.,STMicroelectronics, Inc.,International Business Machines Corporation
- Current Assignee Address: KY Grand Cayman US TX Coppel;l US NY Armonk
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Kristian E. Ziegler
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/02 ; H01L27/088 ; H01L29/78 ; H01L27/092 ; H01L29/66 ; H01L21/84 ; H01L21/306 ; H01L21/308

Abstract:
Methods and semiconductor structures formed from the methods are provided which facilitate fabricating semiconductor fin structures. The methods include, for example: providing a wafer with at least one semiconductor fin extending above a substrate; transforming a portion of the semiconductor fin(s) into an isolation layer, the isolation layer separating a semiconductor layer of the semiconductor fin(s) from the substrate; and proceeding with forming a fin device(s) of a first architectural type in a first fin region of the semiconductor fin(s), and a fin device(s) of a second architectural type in a second fin region of the semiconductor fin(s), where the first architectural type and the second architectural type are different fin device architectures.
Public/Granted literature
- US20160260742A1 FIN ISOLATION STRUCTURES FACILITATING DIFFERENT FIN ISOLATION SCHEMES Public/Granted day:2016-09-08
Information query
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