Invention Grant
- Patent Title: 2DEG-based sensor and device for ECG sensing
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Application No.: US14265088Application Date: 2014-04-29
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Publication No.: US09675262B2Publication Date: 2017-06-13
- Inventor: Roman Vitushinsky , Peter Offermans
- Applicant: Stichting IMEC Nederland
- Applicant Address: NL Eindhoven
- Assignee: Stichting IMEC Nederland
- Current Assignee: Stichting IMEC Nederland
- Current Assignee Address: NL Eindhoven
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: EP13165848 20130429
- Main IPC: A61B5/0408
- IPC: A61B5/0408 ; H01L27/088 ; H01L29/778 ; H01L29/423 ; G01N27/12 ; G01N27/414 ; A61B5/021 ; A61B5/0452 ; A61B5/00

Abstract:
The disclosed technology generally relates to sensors comprising a two-dimensional electron gas (2DEG), and more particularly to an AlGaN/GaN 2DEG-based sensor for sensing signals associated with electrocardiograms, and methods of using the same. In one aspect, a sensor comprises a substrate and a GaN/AlGaN hetero-junction structure formed on the substrate and configured to form a two-dimensional electron gas (2DEG) channel within the GaN/AlGaN hetero-junction structure. The sensor additionally comprises Ohmic contacts connected to electrical metallizations and to the 2DEG channel, wherein the GaN/AlGaN hetero-junction structure has a recess formed between the Ohmic contacts. The sensor further comprises a dielectric layer formed on a top surface of the sensor.
Public/Granted literature
- US20140323895A1 2DEG-BASED SENSOR AND DEVICE FOR ECG SENSING Public/Granted day:2014-10-30
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