Invention Grant
- Patent Title: Method of manufacturing a metal mask by laser cutting
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Application No.: US14320835Application Date: 2014-07-01
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Publication No.: US09676063B2Publication Date: 2017-06-13
- Inventor: Doh-Hyoung Lee , Da Hee Jeong
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2013-0122828 20131015
- Main IPC: B23K26/38
- IPC: B23K26/38 ; C23C14/04 ; B23K26/382 ; B23K26/362 ; H01L51/56 ; H01L51/00

Abstract:
A manufacturing method of a metal mask including a plurality of pattern openings includes forming a first depression portion by radiating a first laser beam focused on a plane beyond a subject under processing, and then forming the plurality of pattern openings at a bottom part of the first depression portion by radiating a second laser beam focused on the bottom part of the first depression portion. Because the energy of the second laser beam is less than the first laser beam, manufacturing time of the mask is reduced while the sidewalls of the pattern opening are smooth and may be inclined, to allow for a better deposition of organic emission material onto a large display.
Public/Granted literature
- US20150104608A1 METAL MASK AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-04-16
Information query
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