发明授权
- 专利标题: Projection-type charged particle optical system and imaging mass spectrometry apparatus
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申请号: US15398625申请日: 2017-01-04
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公开(公告)号: US09679756B2公开(公告)日: 2017-06-13
- 发明人: Kota Iwasaki
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A. Inc., IP Division
- 优先权: JP2014-040967 20140303; JP2015-033378 20150223
- 主分类号: H01J49/16
- IPC分类号: H01J49/16 ; H01J49/40 ; H01J49/00 ; H01J49/06
摘要:
Provided is a projection-type charged particle optical system in which a projection magnification can be changed while a decrease in the accuracy in measuring a mass-to-charge ratio is being suppressed. A projection-type charged particle optical system according to the present invention includes a first electrode disposed so as to face a sample and having an opening formed therein for allowing a charged particle to pass, a second electrode disposed on a side of the first electrode opposite to where the sample is disposed and having an opening formed therein for allowing the charged particle to pass, and a flight-tube electrode disposed such that the charged particle that has been emitted from the sample and has passed through the second electrode enters the flight-tube electrode and being configured to form a substantially equipotential space thereinside. A principal plane is formed at at least two positions in a travel path of the charged particle.
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