Invention Grant
- Patent Title: Image sensors
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Application No.: US14960449Application Date: 2015-12-07
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Publication No.: US09679935B2Publication Date: 2017-06-13
- Inventor: Changyong Um , Byungjun Park , Jungchak Ahn
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2015-0006908 20150114
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor may include a device isolation structure defining a plurality of pixel regions in a substrate and a photoelectric conversion element formed in each of the pixel regions. The device isolation structure may include an insulating gapfill layer extending from an upper portion to a lower portion of the device isolation structure, a spacer provided at the upper portion of the device isolation structure and interposed between the insulating gapfill layer and the substrate, and a lower impurity region provided at the lower portion of the device isolation structure and interposed between the insulating gapfill layer and the substrate.
Public/Granted literature
- US20160204142A1 IMAGE SENSORS Public/Granted day:2016-07-14
Information query
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