- 专利标题: Laser-induced forming and transfer of shaped metallic interconnects
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申请号: US15178930申请日: 2016-06-10
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公开(公告)号: US09685349B2公开(公告)日: 2017-06-20
- 发明人: Scott A. Mathews , Iyoel Beniam , Alberto Piqué
- 申请人: The United States of America, as represented by the Secretary of the Navy
- 申请人地址: US DC Washington
- 专利权人: The United States of America, as represented by the Secretary of the Navy
- 当前专利权人: The United States of America, as represented by the Secretary of the Navy
- 当前专利权人地址: US DC Washington
- 代理机构: US Naval Research Laboratory
- 代理商 Stephen T. Hunnius
- 主分类号: H01L21/44
- IPC分类号: H01L21/44 ; H01L21/48 ; H01L21/768 ; H01L23/00
摘要:
A method of forming and transferring shaped metallic interconnects, comprising providing a donor substrate comprising an array of metallic interconnects, using a laser system to prepare the metallic interconnects, forming shaped metallic interconnects, and transferring the shaped metallic interconnect to an electrical device. An electronic device made from the method of providing a donor ribbon, wherein the donor ribbon comprises an array of metal structures and a release layer on a donor substrate, providing a stencil to the metal structures on the donor substrate, applying a laser pulse through the donor substrate to the metal structures, and directing the metal structures to an electronic device.
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