Invention Grant
- Patent Title: Back-end electrically programmable fuse
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Application No.: US13348011Application Date: 2012-01-11
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Publication No.: US09685404B2Publication Date: 2017-06-20
- Inventor: Junjing Bao , Griselda Bonilla , Kaushik Chanda , Samuel S. Choi , Ronald Filippi , Stephan Grunow , Naftali E. Lustig , Dan Moy , Andrew H. Simon
- Applicant: Junjing Bao , Griselda Bonilla , Kaushik Chanda , Samuel S. Choi , Ronald Filippi , Stephan Grunow , Naftali E. Lustig , Dan Moy , Andrew H. Simon
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Mark G. Edwards
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/525 ; H01L23/522 ; H01H85/02
Abstract:
A BEOL e-fuse is disclosed which reliably blows in the via and can be formed even in the tightest pitch BEOL layers. The BEOL e-fuse can be formed utilizing a line first dual damascene process to create a sub-lithographic via to be the programmable link of the e-fuse. The sub-lithographic via can be patterned using standard lithography and the cross section of the via can be tuned to match the target programming current.
Public/Granted literature
- US20130176073A1 BACK-END ELECTRICALLY PROGRAMMABLE FUSE Public/Granted day:2013-07-11
Information query
IPC分类:
