Invention Grant
- Patent Title: Different lightly doped drain length control for self-align light drain doping process
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Application No.: US13801261Application Date: 2013-03-13
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Publication No.: US09685557B2Publication Date: 2017-06-20
- Inventor: Cheng-Ho Yu , Young Bae Park , Shih Chang Chang , Ting-Kuo Chang , Shang-Chih Lin
- Applicant: APPLE INC.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H01L27/12

Abstract:
A method is provided for fabricating thin-film transistors (TFTs) for an LCD having an array of pixels. The method includes depositing a first photoresist layer over a portion of a TFT stack. The TFT stack includes a conductive gate layer, and a semiconductor layer. The method also includes doping the exposed semiconductor layer with a first doping dose. The method further includes etching a portion of the conductive gate layer to expose a portion of the semiconductor layer, and doping the exposed portion of the semiconductor layer with a second doping dose. The method also includes removing the first photoresist layer, and depositing a second photoresist layer over a first portion of the doped semiconductor layer in an active area of the pixels to expose a second portion of the doped semiconductor layer in an area surrounding the active area. The method further includes doping the second portion of the doped semiconductor layer with a third doping dose, the first dose being higher than the second dose and the third dose.
Public/Granted literature
- US20160380112A9 DIFFERENT LIGHTLY DOPED DRAIN LENGTH CONTROL FOR SELF-ALIGN LIGHT DRAIN DOPING PROCESS Public/Granted day:2016-12-29
Information query
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