Invention Grant
- Patent Title: Method for manufacturing a semiconductor device and semiconductor device manufactured by the same
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Application No.: US15094280Application Date: 2016-04-08
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Publication No.: US09690896B2Publication Date: 2017-06-27
- Inventor: Jae-Woo Seo , Jaeha Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2015-0050150 20150409; KR10-2015-0146729 20151021
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G06F17/50 ; H01L21/8238 ; H01L21/768 ; H01L23/528 ; H01L27/02

Abstract:
A method for manufacturing a semiconductor device is provided. The method includes disposing pre-conductive lines and post-conductive lines for forming first and second cells. The first and second cells are adjacent to each other in a first direction. A first conductive line of the first cell extends in a second direction perpendicular to the first direction and is adjacent to a boundary between the first and second cells. A second conductive line and a third conductive line of the second cell extend in the first direction and are adjacent to the boundary. The second and third conductive lines are respectively disposed on two non-adjacent tracks, among a plurality of tracks that extend in the first direction. The first conductive line intersects one of the two non-adjacent tracks and one track disposed between the two non-adjacent tracks.
Public/Granted literature
- US20160300840A1 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURED BY THE SAME Public/Granted day:2016-10-13
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