- 专利标题: Method for producing image pickup apparatus and method for producing semiconductor apparatus
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申请号: US14994581申请日: 2016-01-13
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公开(公告)号: US09698195B2公开(公告)日: 2017-07-04
- 发明人: Takatoshi Igarashi , Noriyuki Fujimori , Kazuhiro Yoshida
- 申请人: OLYMPUS CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: OLYMPUS CORPORATION
- 当前专利权人: OLYMPUS CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Scully, Scott, Murphy & Presser, PC
- 优先权: JP2012-123223 20120530
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L25/04 ; H04N5/225 ; H04N5/335 ; H01L23/31
摘要:
A method for producing an image pickup apparatus includes: a process of cutting an image pickup chip substrate where electrode pads are formed around each of the light receiving sections to fabricate image pickup chips; a process of bonding image pickup chips determined as non-defective products to a glass wafer to fabricate a joined wafer; a process of filling a sealing member among the image pickup chips on the joined wafer; a machining process including a thinning a thickness of the joined wafer to flatten a machining surface and a forming through-hole interconnections, each of which is connected to each of the electrode pads; a process of forming a plurality of external connection electrodes, each of which is connected to each of the electrode pads via each of the through-hole interconnections; and a process of cutting the joined wafer.
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