Capacitor structure of integrated circuit chip and method of fabricating the same
Abstract:
In accordance with some embodiments of the present disclosure, a capacitor structure of an integrated circuit chip includes an insulation layer, a first electrode, and a second electrode. The insulation layer includes an insulation partition and has a first trench and a second trench separated from the first trench by the insulation partition. The first electrode is disposed in the first trench. The second electrode is disposed in the second trench. The first electrode first electrode is arranged along a spiral trajectory and surrounds a spiral channel. The second electrode is disposed within the spiral channel.
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