- 专利标题: Capacitive coupled resonator and filter device with comb electrodes and support frame separation from piezoelectric layer
-
申请号: US14954251申请日: 2015-11-30
-
公开(公告)号: US09698754B2公开(公告)日: 2017-07-04
- 发明人: Dariusz Burak
- 申请人: Avago Technologies General IP (Singapore) Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: Avago Technologies General IP (Singapore) Pte. Ltd.
- 当前专利权人: Avago Technologies General IP (Singapore) Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H01L41/047 ; H01L41/053 ; H03H9/17
摘要:
A capacitive coupled resonator device includes a substrate, a bottom electrode, a piezoelectric layer, a top electrode, and at least one support frame positioned between the piezoelectric layer and the top electrode and/or positioned between the piezoelectric layer and the bottom electrode. The top electrode includes a first top comb electrode having a first top bus bar and first top fingers extending in a first direction from the first top bus bar, and a second top comb electrode having a second top bus bar and second top fingers extending in a second direction from the second top bus bar, the second direction being substantially opposite to the first direction such that the first and second top fingers form a top interleaving pattern. The at least one support frame includes air-gaps separating at least one of the top electrode and the bottom electrode from the piezoelectric layer, respectively.