- 专利标题: Patterning of electroless metals by selective deactivation of catalysts
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申请号: US14918227申请日: 2015-10-20
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公开(公告)号: US09699914B2公开(公告)日: 2017-07-04
- 发明人: Mihir Reddy , Michael Riley Vinson , Sunity K. Sharma
- 申请人: Averatek Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: AVERATEK CORPORATION
- 当前专利权人: AVERATEK CORPORATION
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Fish & Tsang, LLP
- 主分类号: H05K1/09
- IPC分类号: H05K1/09 ; H05K3/18 ; C23C18/00
摘要:
Methods and devices for patterning electroless metals on a substrate are presented. An active catalyst layer on the substrate can be covered with a patterned mask and treated with a deactivating chemical reagent, which deactivates the catalyst layer not covered by the mask. Once the patterned mask is removed, the electroless metal layer can be placed to have a patterned electroless metals. Alternatively, a substrate can be coated with a blocking reagent in a pattern first to inhibit formation of the catalyst layer before a catalyst layer can be placed over the blocking agent layer and then electroless metal layer is placed on the catalyst layer. The pattern of the blocking reagent acts as a negative pattern of the final conductive line pattern.
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