Invention Grant
- Patent Title: Corrosion sensor retainer assembly apparatus and method for detecting corrosion
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Application No.: US14489148Application Date: 2014-09-17
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Publication No.: US09704761B2Publication Date: 2017-07-11
- Inventor: Mark Taskar , Iqbal Shareef , Anthony Zemlock
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: G01N17/02
- IPC: G01N17/02 ; H01L21/66 ; H01L21/67

Abstract:
A corrosion sensor retainer assembly and method for predicting and detecting corrosion within a gas delivery system of a semiconductor substrate processing apparatus. The corrosion sensor retainer assembly comprises a laminate that includes a first insulating layer with a first port and a second insulating layer with a second port, wherein the first port and the second port are configured to retain a seal. The corrosion sensor retainer assembly includes a conductor housed within the laminate. The conductor forms a path that extends around the first port and the second port. At least a portion of the conductor has an exposed surface with a property that changes in the presence of corrosive gas or acid.
Public/Granted literature
- US20160076989A1 CORROSION SENSOR RETAINER ASSEMBLY APPARATUS AND METHOD FOR DETECTING CORROSION Public/Granted day:2016-03-17
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