- 专利标题: Graphene heat dissipating structure
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申请号: US14662091申请日: 2015-03-18
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公开(公告)号: US09721867B1公开(公告)日: 2017-08-01
- 发明人: Cody M. Washburn , Timothy N. Lambert , David R. Wheeler , Christopher T. Rodenbeck , Tarak A. Railkar
- 申请人: Sandia Corporation , TriQuint Semiconductor, Inc.
- 申请人地址: US NM Albuquerque US NC Greensboro
- 专利权人: National Technology & Engineering Solutions of Sandia, LLC,Qorvo US, Inc.
- 当前专利权人: National Technology & Engineering Solutions of Sandia, LLC,Qorvo US, Inc.
- 当前专利权人地址: US NM Albuquerque US NC Greensboro
- 代理机构: Medley, Behrens & Lewis, LLC
- 主分类号: B82Y40/00
- IPC分类号: B82Y40/00 ; H01L21/02 ; H01L23/373
摘要:
Various technologies presented herein relate to forming one or more heat dissipating structures (e.g., heat spreaders and/or heat sinks) on a substrate, wherein the substrate forms part of an electronic component. The heat dissipating structures are formed from graphene, with advantage being taken of the high thermal conductivity of graphene. The graphene (e.g., in flake form) is attached to a diazonium molecule, and further, the diazonium molecule is utilized to attach the graphene to material forming the substrate. A surface of the substrate is treated to comprise oxide-containing regions and also oxide-free regions having underlying silicon exposed. The diazonium molecule attaches to the oxide-free regions, wherein the diazonium molecule bonds (e.g., covalently) to the exposed silicon. Attachment of the diazonium plus graphene molecule is optionally repeated to enable formation of a heat dissipating structure of a required height.
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