Invention Grant
- Patent Title: Thin film transistor device, manufacturing method thereof, and display apparatus
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Application No.: US15030576Application Date: 2015-08-14
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Publication No.: US09721978B2Publication Date: 2017-08-01
- Inventor: Wu Wang , Haijun Qiu , Fei Shang , Guolei Wang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD , Chongqing BOE Optoelectronics Technology CO., Ltd
- Applicant Address: CN Beijing CN Chongqing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Chongqing
- Agency: Anova Law Group, PLLC
- Priority: CN201410729803 20141203
- International Application: PCT/CN2015/087018 WO 20150814
- International Announcement: WO2016/086687 WO 20160609
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/441 ; H01L29/417 ; H01L29/786 ; H01L21/027 ; H01L21/4757 ; H01L21/4763 ; H01L29/45 ; H01L29/66

Abstract:
Various embodiments provide a thin film transistor (TFT) device, a manufacturing method of the TFT device, and a display apparatus including the TFT device. An etch stop layer (ESL) material is formed on an active layer on a substrate. An electrical conductive layer material is formed on the ESL material for forming a source electrode and a drain electrode. The electrical conductive layer material is patterned to form a first portion of the source electrode containing a first via-hole through the source electrode, and to form a first portion of the drain electrode containing a second via-hole through the drain electrode. The ESL material is patterned to form an etch stop layer (ESL) pattern including a first ESL via-hole connecting to the first via-hole through the source electrode and including a second ESL via-hole connecting to the second via-hole through the drain electrode.
Public/Granted literature
- US20160336359A1 THIN FILM TRANSISTOR DEVICE, MANUFACTURING METHOD THEREOF, AND DISPLAY APPARATUS Public/Granted day:2016-11-17
Information query
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